Fabrication and Performance of a Photonic-Microfluidic Integrated Device
نویسندگان
چکیده
منابع مشابه
Fabrication and Performance of a Photonic-Microfluidic Integrated Device
Fabrication and performance of a functional photonic-microfluidic flow cytometer is demonstrated. The devices are fabricated on a Pyrex substrate by photolithographically patterning the microchannels and optics in a SU-8 layer that is sealed via a poly(dimethylsiloxane) (PDMS) layer through a unique chemical bonding method. The resulting devices eliminate the free-space excitation optics throug...
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ژورنال
عنوان ژورنال: Micromachines
سال: 2012
ISSN: 2072-666X
DOI: 10.3390/mi3010062